Diener PARYLENE P300
Deposited materials:
parylene N, C, D, F-VT4
Range of thicknesses:
0,05 to 100 micrometers
Dimensions:
width approx. 2700 mm
depth approx. 2200 mm
height approx. 1600 mm
Pyrolysis:
4 kW / max. 850 °C
Chamber:
diameter: 700 mm
height: 720 mm
Carrousel:
diameter: 600 mm
height: 660 mm
Cold trap:
liquid N² (LN2)
Pumping system:
two-stage rotary pumping speed
1800 m3/h
Control: full PC control system
software based on Windows
Connections:
3 phases / 400 V / 32 A / 50- 60 Hz
Compressed air: 6 bars oil free and dry