Diener PARYLENE P6
Deposited materials: parylene N, C, D, F-VT4
Range of thicknesses: 0.05 to 20 micrometers
Dimensions: width: ±700 mm // depth: ±500 mm // height: ±700 mm
Pyrolysis: 1.6 kW / max. 750 °C
Chamber: diameter: 200 mm // height: 200 mm
Carrousel: diameter: 170 mm // height:170 mm
Cold trap: Liquid N2
Pump system: two-stage rotary vane // Pumping speed 16 m3/h
Ultimate pressure: 1 x 10-3 mbar
Control: full PC control system, software based on Windows
Connections: 230 V/16 A/50-60 Hz