Diener FEMTO

De FEMTO plasma cleaner is available in different configurations. This is a short overview of the standard configurations.

Basic configuration
  • Volume of the vacuum chamber 1,9 to 6 liter
  • Vacuum pump different possibilities according to the application
  • Gas supply with needle valves or mass flow controllers (MFC)
  • Vacuum chamber made in stainless steel, aluminum, glass or quartz
  • Substrate tray in different materials and configurations
  • Generator 40-80 kHz, 13.56 MHz or 2.45 GHz
  • Single electrode of multi-level electrodesRIE - electrode option
  • Manuel control, basic PC-control of full PC-control

Provinciebaan 102, B-Gavere
BE 0502.711.309
+32 (0)478 54 69 68