Diener PARYLENE P30

Deposited materials:     
parylene N, C, D, F-VT4

Range of thicknesses:     
0.05 to 50micrometers

Dimensions:        
width: approx. 1400 mm     
depth: approx. 700 mm                 
height: approx. 1700 mm

Pyrolysis:         
2 kW / max. 700 °C  

Chamber:         
diameter: 310 mm      
height: 500 mm

Carrousel:        
diameter: 150 mm      
height: 270 mm

Cold trap:        
Liquid N2

Pump system:    
two-stage rotary vane  
pumping speed 25 m3/h

Ultimate pressure:     
1 x 10-3 mbar

Control:         
full PC control system,  software based on Windows

Connections:        
400 V/16 A/50-60 Hz ,Compressedair