Diener NANO
De NANO plasma cleaner is available in different configurations. This is a short overview of the standard configurations.
Basic configuration
Basic configuration
- Volume of the vacuum chamber 18 to 36 liter
- Vacuum pump different possibilities according to the application
- Gas supply with needle valves or mass flow controllers (MFC)
- Vacuum chamber made in stainless steel, aluminum , glass or quartz
- Substrate tray in different materials and configurations
- Generator 40-80 kHz, 13.56 MHz or 2.45 GHz
- Single electrode of multi-level electrodes
- RIE - electrode option
- Manuel control, basic PC-control of full PC-control