Diener PARYLENE P120D

Deposited materials:       
parylene N, C, D, F-VT4

Range of thicknesses:           
0.05 to 50 micrometers

Dimensions:                
width: approx. 2200 mm 
depth: approx. 2700 mm 
height: approx. 1600 mm

Pryolysis:                         
4 kW / max 850°C

Parylene coating system P120 D 
with rotary drum configuration 
(side view)

Chamber:                        
diameter: 500 mm 
length: 610 mm
Volume: approx. 120 litres

Rotary drum:
diameter: 445 mm 
length: 580 mm
Volume: approx. 90 litres  

Cold trap:                        
Liquid N2

Pump system:

dry pump system
pumping speed 1800 m3/h

Ultimate pressure: 
1 x 10-3 mbar

Control: 
full PC control system, 
software based on Windows

Connections: 
3 phases/400 V AC at 32 A/50-60 Hz
Compressed Air: 6 bars oil free and dry