Diener PARYLENE P260
Deposited materials: parylene N, C, D, F-VT4, F-AF4
Range of thicknesses: 0,05 to 100 micrometers
Dimensions:
width: approx. 2600 mm
depth: approx. 1000 mm
height: approx. 2000 mm
Pyrolysis: 4 kW / max. 850 °C
Gas injection: homogenous dispersal system
View into the coating chamber of the P260
Chamber: diameter: 640 mm, height: 800 mm
Carrousel: diameter: 560 mm, height: 650 mm
Cold trap: liquid N2
Pump system:
two-stage rotary pumping speed 1800 m3/h
Ultimate pressure:
1 x 10-3 mbar
Control:
full PC control system,
software based on Windows